| 摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of a vapor deposition patterning of an EL display panel. SOLUTION: A vapor deposition is carried out by arranging a vapor deposition mask, having openings for forming a vapor deposition layer of the electroluminescent element into an intended pattern by making the material evaporated from a vapor deposition source selectively pass through toward a glass substrate, between the vapor deposition source and the glass substrate. A material, having a thermal expansion coefficient of not more than 160% and not less than 30% of that of glass, is used as the material for the vapor deposition mask. By the above, the deformation of the vapor deposition mask, located near to the vapor deposition source and becoming high temperature, is minimized, and the accuracy of the vapor deposition patterning is improved.
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