| 摘要 |
A sensor for measuring electrostatic having an elongated vibratory cantilever beam (100) supported at a mechanical node (N3) at one end, a sensitive electrode (114) attached on the other end of the cantilever beam (100) and adapted to be diposed toward an electrical charge, field or potential to be measured, and a driver transducer (106) on the cantilever beam (100) for vibrating the cantilever beam (100) to vary capacitive coupling between the electrode (114) and the electrical charge, field or potential being measured. The driver transducer (106) is located at a location along the beam (100) and is operated at a vibration of the mechanical node so that the degree of stiffness of the mechanical node does not affect the operating frequency and the displacement at the free end of the cantilever (100) allowed measurements with various spatial resolution characteristics. |
