发明名称 PHOTORESIST REMOVER COMPOSITION AND REMOVING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a photoresist removing composition which can easily remove a photoresist without corroding various materials of semiconductor layers and can be rinsed only with water without using an organic solvent after removing the photoresist. SOLUTION: The photoresist removing composition comprises an alkali compound, hydroxymethylamine and an aromatic dihydroxy compound.
申请公布号 JP2003156859(A) 申请公布日期 2003.05.30
申请号 JP20010357688 申请日期 2001.11.22
申请人 MITSUBISHI GAS CHEM CO INC 发明人 IKEMOTO KAZUTO;MARUYAMA TAKEHITO;YOSHIDA HIROSHI
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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