| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance the accuracy and reliability of the detection of an alignment mark by an image processing operation, irrespective of irregularities in the contamination of a substrate or in the production quality of the mark. SOLUTION: When the alignment mark 14 is detected by using a pattern matching operation, edge parts of the alignment mark 14 are covered with a plurality of rectangles S1 , S2 , S3 , S4 , the pattern matching operation is applied to the plurality of rectangles, and the alignment mark is detected.</p> |
