发明名称 ANGULAR VELOCITY MEASURING APPARATUS
摘要 PROBLEM TO BE SOLVED: To inhibit wrong output that occurs from a vibrator, when vibration is applied from the outside, while the vibrator is not rotating in an angular velocity-measuring apparatus for accommodating the vibrator in a package and detecting speed in a rotary angular velocity, based on an output signal from the vibrator. SOLUTION: The angular velocity measuring apparatus 10 measures the angular velocity of rotation, using a prescribed axis Z as a center. The apparatus 10 has a vibrator 30, that responds to the rotation and is made of a piezoelectric single crystal, a package that accommodates the vibrator and has external dimensions in a direction which is vertical with respect to the prescribed axis Z that is larger than external dimensions D2 in the direction of the prescribed axis, a support substrate 70 that supports the package and has a main surface 70a located opposite to a bottom surface 20a, and a support member 2 that supports the package 20 on the support substrate 70, so that the bottom surface 20a of the package runs nearly in parallel with a main surface 70a of the support substrate 70. The support member 2 is jointed to the main surface 70a of the support substrate 70.
申请公布号 JP2003156336(A) 申请公布日期 2003.05.30
申请号 JP20010356898 申请日期 2001.11.22
申请人 NGK INSULATORS LTD 发明人 KIKUCHI TAKAYUKI;ISHIKAWA SEIJI
分类号 G01P1/02;G01C19/56;G01P9/04;H01L41/08 主分类号 G01P1/02
代理机构 代理人
主权项
地址