| 摘要 |
PROBLEM TO BE SOLVED: To and simultaneously to make efficiently the necessary capacity change quantity efficiently securable while reducing the area of a substrate constituting a sensor, concerning a capacitive humidity sensor. SOLUTION: On one face of a semiconductor substrate 10, a pair of comb tooth-shaped electrodes 31, 32 are formed separately and oppositely on the same plane, and a hygroscopic film 50 is formed so as to cover the pair of the electrodes 31, 32, and the humidity is detected based on the capacitive value between the pair of the electrodes 31, 32 changing corresponding to the change of the surrounding humidity. Here, assuming that the width of each comb tooth of the pair of the electrodes 31, 32 is L1 and the distance between the comb tooth of one electrode 31 and the comb tooth of the other electrode 32 facing thereto is L2, such relation is satisfied that the distance L2 is 5μm when the width L1 is less than 3μm, and that the distance L2 is 5μm or less when the width L1 is 3μm or more.
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