发明名称 HEAT TREATMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To obtain a heat treatment system in which the process recipe can be prepared in a short time and the delivery schedule can be quickened. SOLUTION: A controller 12 for controlling a heat treatment system according to a process recipe is connected with a data base 5 through the Internet line 3. A plurality of process recipes created depending on the arrangement information of the heat treatment system are stored in the data base 5. When a process recipe creation is requested from the controller 12, a transmitting means 2b transmits the arrangement information of the heat treatment system 11 automatically to the data base 51 through the Internet line 3. Based on the received arrangement information, a communication control means 2 retrieves a process recipe helpful for preparing the process recipe of the heat treatment system 11 among the plurality of process recipes stored in the data base 51. The process recipe hit through retrieval is received automatically by the controller 12 through the line 3.
申请公布号 JP2003158049(A) 申请公布日期 2003.05.30
申请号 JP20010355096 申请日期 2001.11.20
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 NAKANO MINORU;UENO MASAAKI
分类号 H01L21/22;H01L21/02;H01L21/205;H01L21/324;(IPC1-7):H01L21/02 主分类号 H01L21/22
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