发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To turn on power supply of a electron microscope automatically as well as to save power consumed till it gets ready for use. SOLUTION: Drive of a time management means 6 and input and break of power supply of a device and high-voltage-generating circuit of an electron gun 14 through the time management means 6 are enabled. Furthermore, by arranging to set up a program per week, the device is enabled to be started up at the same setting repeatedly. Thus, an operator can carry out an observation work with the electron microscope as soon as the reports to the office, saving wasteful driving power and restraining power consumption of the electron microscope.
申请公布号 JP2003157788(A) 申请公布日期 2003.05.30
申请号 JP20010353953 申请日期 2001.11.20
申请人 HITACHI HIGH-TECHNOLOGIES CORP;HITACHI SCI SYST LTD 发明人 NEMOTO MASAHIRO
分类号 H01J37/24;(IPC1-7):H01J37/24 主分类号 H01J37/24
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