| 摘要 |
<p>The invention concerns an apparatus and a method for optical characterization of an object (1). The object (1) to be analyzed is placed in a first focal point of a reflecting optical system (2). The light produced (5') by the object (1) is collected at a second focal point (8) of said optical system (2) by collecting means (9) and addressed to a multipoint photosensitive detector (10). The measured intensity signals are then digitally processed by a computer (11). The method is characterized in that the reflecting optical system (2) is a rotating mirror with elliptical cross-section. The invention is applicable in optics, semiconductor industries (surface condition control after polishing, roughness measurement, and the like), mechanical industries (surface roughness before treatment, bonding, and the like), and contact-free characterization of works of art (paintings, ceramics, and the like).</p> |
