| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure detector that can accurately detect its external pressure over a long period. SOLUTION: A package for pressure detector is composed of a ceramic substrate 1 and a ceramic plate 2. The ceramic substrate 1 has a mounting section 1b, on which a semiconductor element 3 is mounted on one main surface and a first metallized electrode 7 for forming electrostatic capacitance and a first metallized layer 8 for junction surrounding the electrode 7 on the other main surface. The ceramic plate 2 has a projection section 2a, in the outer peripheral section of one main surface, a second metallized electrode 9 facing the first metallized electrode 7 on the main surface surrounded by the projecting section 2a, and a second metallized layer 10 for junction brazed to the first metallized layer 8 via a brazing material 11 on the projecting section 2a. The plate 2 is bonded flexibly to the ceramic substrate 1, so as to form a hermetically sealed space between the other main surface of the substrate 1 and the plate 2, and the brazing material 11 has a thickness of 5-30μm.
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