发明名称 SPATTERING TARGET FOR USE IN FORMING PREVENTIVE FILM FOR OPTICAL RECORDING MEDIUM, METHOD FOR PREPARING THE TARGET, AND OPTICAL RECORDING MEDIUM HAVING PREVENTIVE FILM FORMED BY USE OF THE TARGET
摘要 A spattering target for use in forming a preventive film for an optical recording medium comprising a composite of zinc sulfide and silicon oxide, characterized in that the total content of one or more of halides and halogens in the target is 30 ppm or less in terms of halogens. The spattering target can be so prepared as to be essentially composed of fine crystal grains and have a high density of 97 % or higher, and thus can be used as a preventive film for a phase-change optical recording medium, and can be prepared with stability at a low cost. Further, the spattering target is free from or is suppressed in discoloration such as unevenness of color, which results in the increase of the production yield, and the use of the above target can improve the quality of an optical recording medium.
申请公布号 WO03044241(A1) 申请公布日期 2003.05.30
申请号 WO2002JP08612 申请日期 2002.08.27
申请人 NIKKO MATERIALS COMPANY, LIMITED 发明人 YAHAGI, MASATAKA;TAKAMI, HIDEO
分类号 C23C14/34;G11B7/254;G11B7/257;G11B7/26;(IPC1-7):C23C14/34;G11B7/24 主分类号 C23C14/34
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