METHOD FOR MANUFACTURING MEMBRANE SENSOR UNIT, MEMBRANE SENSOR UNIT, AND MEMBRANE SENSOR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a membrane sensor. SOLUTION: The membrane sensor unit has a support made of a semiconductor material wherein a heat insulating sink is formed under a flat membrane for the construction of a structure for at least one sensor. In the regions in the support predetermined to define the structure for the sensor element, various impurities are concentrated and retained in the enclosed semiconductor material, and the semiconductor material in between the impurity implanted regions is rendered porous. The porous semiconductor material in the sink region under the semiconductor material is removed and the structure for the sensor element is rendered porous.