THIN-FILM MAGNETIC HEAD SUBSTRATE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a thin-film magnetic head substrate which is provided with high exposure accuracy by reducing variance in amorphous alumina films formed on a ceramic substrate. SOLUTION: At a sputtering device, films are formed by continuously or intermittently rotating a ceramic substrate. Thus, variance in thickness of amorphous alumina films formed on one substrate is greatly reduced.