发明名称 BALL LIMITING METALLURGY FOR INPUT/OUTPUTS AND METHODS OF FABRICATION
摘要 The present invention is an input/ouput for a device and it method of fabrication. The input/output of the present invention comprises a bond pad having a ball limiting metallurgy (BLM) formed thereon and a bump formed on the ball limiting metallurgy (BLM). In an embodiment of the present invention the ball limiting metallurgy comprises a first film comprising nickel, vanadium, and nitrogen. In the second embodiment of the present invention the bump limiting metallurgy includes a first alloy film comprising a nickel-niobium alloy.
申请公布号 WO0203461(A3) 申请公布日期 2003.05.30
申请号 WO2001US18666 申请日期 2001.06.08
申请人 INTEL CORPORATION (A DELAWARE CORPORATION);SESHAN, KRISHNA 发明人 SESHAN, KRISHNA
分类号 H01L21/60;H01L23/485 主分类号 H01L21/60
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