| 摘要 |
A MEMS actuator 1 comprising an actuator member 2 operably engaged by at lea st one actuator beam 4 and heating means 12 for heating the or each beam 4. The heating may cause expansion of the or each beam4, wherein the or each beam 4 has two ends A, A' and the or each beam 4 is fixed at only one end A and wherein the expansion effects movement of the actuator member 2. The heating may cause thermal expansion of the beam 4 in one direction and longitudinal displaceme nt of the beam 4 in the direction of thermal expansion, which longitudinal displacement effects movement of the actuator member 2. The beam 4 may act on the member 2 at a position in relation to a pivot point P so as to produce a torque which effects pivoting of the member 2 about the pivot point P. The actuator may have at least two actuator beams 4 and heating the at least two beams 4 may cause simultaneous expansion of the at least two beams 4, which simultaneous expansion effects movement of the actuator member 2. Alternatively, heating one of the at leas t two beams 4 may cause differential, expansion of the at least two beams 4, which differential expansion effects movement of the actuator member 2. The actuat or may have at least two actuator members 202 operably engaged by at least one actuator beam204 and heating the or each beam 204 may cause expansion of the or each beam 204, which expansion effects differential movement of the at least two membe rs 202 or bending of the at least two members 202.
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