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发明名称
SELF-ALIGNED CONTACTS FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
IL137016(A)
申请公布日期
2003.05.29
申请号
IL19980137016
申请日期
1998.12.11
申请人
LAM RESEARCH CORPORATION
发明人
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/3213;H01L21/60;(IPC1-7):H01L21/311
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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