发明名称 Method for manufacturing thin film, and thin film
摘要 A method for manufacturing thin film and a thin film. The method comprises dipping a substrate in a solution that dries up forming a layer on the surface of the substrate and controlling layer thickness by changing the rate of dipping the substrate in the solution. Before the next dipping after the first dipping, the position of the substrate is changed such that the next dipping will be carried out in a direction which is at an angle to the direction of the previous dipping.
申请公布号 US2003099778(A1) 申请公布日期 2003.05.29
申请号 US20020301740 申请日期 2002.11.22
申请人 VOIPIO VILLE 发明人 VOIPIO VILLE
分类号 B05D1/18;B05D5/00;B05D7/00;(IPC1-7):H01L21/00;H01L21/84;H01L21/44;B05D5/12 主分类号 B05D1/18
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