| 发明名称 |
Probe card, semiconductor device testing apparatus, and probe contact method |
| 摘要 |
An inexpensive probing card that has probe pins for contacting pads with high reliability. The probe pins are arranged on a base plate. The probe pins move along the pads when contacting the pads. A stopper restricts the movement of the probe pins.
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| 申请公布号 |
US2003098701(A1) |
申请公布日期 |
2003.05.29 |
| 申请号 |
US20020284085 |
申请日期 |
2002.10.31 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
TATEMATSU TSUTOMU;TOGASHI KENJI;NANBU TETSUHIRO;ISHIHARA SHIGENOBU;HAMADA MORIHIKO;ARISAKA YOSHIKAZU;ITAGAKI KUNIHIRO;AOKI SHIGEKAZU |
| 分类号 |
G01R1/073;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/073 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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