发明名称 |
Micro-electromechanical switch having a conductive compressible electrode |
摘要 |
A micro-electro mechanical switch having a restoring force sufficiently large to overcome stiction is described. The switch is provided with a deflectable conductive beam and multiple electrodes coated with an elastically deformable conductive layer. A restoring force which is initially generated by a single spring constant k0 upon the application of a control voltage between the deflectable beam and a control electrode coplanar to the contact electrodes is supplemented by adding to k0 additional spring constants k1, . . . , kn provided by the deformable layers, once the switch nears closure and the layers compress. In another embodiment, deformable, spring-like elements are used in lieu of the deformable layers. In an additional embodiment, the compressible layers or deformable spring-like elements are affixed to the deflecting beam facing the switch electrodes
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申请公布号 |
US2003098618(A1) |
申请公布日期 |
2003.05.29 |
申请号 |
US20010996148 |
申请日期 |
2001.11.28 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GREENBERG DAVID R.;DELIGIANNI HARIKLIA;GROVES ROBERT A.;JAHNES CHRISTOPHER V.;LUND JENNIFER L.;SAENGER KATHERINE L.;VOLANT RICHARD P. |
分类号 |
B81B3/00;H01H1/24;H01H1/26;H01H59/00;(IPC1-7):H02H1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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