发明名称 |
High purity fluid delivery system |
摘要 |
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
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申请公布号 |
US2003098069(A1) |
申请公布日期 |
2003.05.29 |
申请号 |
US20010995067 |
申请日期 |
2001.11.26 |
申请人 |
SUND WESLEY E.;DILLE JOSEPH C.;BARGER MICHAEL J.;PAWLAS GARY E. |
发明人 |
SUND WESLEY E.;DILLE JOSEPH C.;BARGER MICHAEL J.;PAWLAS GARY E. |
分类号 |
G01F1/00;G01F1/84;G01L19/06;G05D7/06;(IPC1-7):F16K31/12 |
主分类号 |
G01F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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