| 摘要 |
A matrix type piezoelectric/electrostrictive device in which a plurality of piezoelectric/electrostrictive elements almost in a pillar shape, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes, are vertically provided on a thick ceramic substrate, and which is driven by displacement of the piezoelectric/electrostrictive substance. In this matrix type piezoelectric/electrostrictive device, a plurality of piezoelectric/electrostrictive elements are integrally bonded to the ceramic substrate and independently arranged in two dimensions. The pair of electrodes is formed on the sides of the piezoelectric/electrostrictive substance. The percentage of transgranularly fractured crystal grains on at least the sides of the piezoelectric/electrostrictive substance on which the electrodes are formed is 10% or less. The piezoelectric/electrostrictive substance forms a curved surface near a joined section between the piezoelectric/electrostrictive substance and the ceramic substrate. According to this piezoelectric/electrostrictive device, large displacement is obtained at a low voltage, with achievement of a high speed response, a large force generation, excellent mounting capability, a higher degree of integration. The action such as pushing, distorting, moving, striking (impacting), or mixing can be applied to an object of action, or the device operates when such action is applied.
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