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发明名称
Liquid feed vaporization system and gas injection device
摘要
申请公布号
EP0849375(B1)
申请公布日期
2003.05.28
申请号
EP19970120370
申请日期
1997.11.20
申请人
EBARA CORPORATION
发明人
HORIE, KUNIAKI;SUZUKI, HIDENAO;NAKADA, TSUTOMU;KURIYAMA, FUMIO;MURAKAMI, TAKESHI;ABE, MASAHITO;ARAKI, YUJI;UEYAMA, HIROYUKI
分类号
C23C16/44;C23C16/448;C23C16/455;(IPC1-7):C23C16/44;B01D1/00
主分类号
C23C16/44
代理机构
代理人
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