APPARATUS FOR LOADING/UNLOADING SUBSTRATE

摘要

PURPOSE: An apparatus for loading/unloading a substrate is provided to prevent the second supporting member and the members for fixing the second supporting member from being corroded by making the second supporting member, a bracket for fixing the second supporting member and a bolt formed of aluminum in which an aluminum oxide layer is formed through an anodizing process. CONSTITUTION: The first supporting member(102) supports a cassette containing a plurality of semiconductor substrates when the semiconductor substrates are loaded/unloaded into/from a loadlock chamber installed in an apparatus for processing the semiconductor substrate. The second supporting member(104) supports the cassette, vertically installed in a side of the first supporting member. The bracket(106) fixes the first and second supporting members. The aluminum oxide layer is formed on the surface of the second supporting member and the bracket through an anodizing process so that the corrosion of the second supporting member and the bracket caused by corrosive gas is controlled when the substrate is processed.