首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
APPARATUS AND METHOD FOR FLOW OF PROCESS GAS IN AN ULTRA-CLEAN ENVIRONMENT
摘要
申请公布号
EP1313896(A2)
申请公布日期
2003.05.28
申请号
EP20010973670
申请日期
2001.08.28
申请人
REFLECTIVITY INC.
发明人
PATEL, SATYADEV;SCHAADT, GREGORY P.;MACDONALD, DOUGLAS B.;MACDONALD, NILES K.
分类号
H01L21/00;H01L21/302;C03C15/00;C25F3/12;H01L;(IPC1-7):C25F3/12
主分类号
H01L21/00
代理机构
代理人
主权项
地址
您可能感兴趣的专利
ACCELERATOR FOR HORIZONTAL WATER HEATERS
METHOD FOR SPECTROSCOPY AND IMAGING AND EQUIPMENT FOR CARRYING OUT SAID METHOD
DEPOSITION PROCESS
CRUSHING MACHINE INCORPORATING A BLADE CRUSHER
REFRIGERATOR COMPRISING A COLLAPSIBILE SHELF
COMBINED CANNULA AND AIRFLOW TEMPERATURE SENSOR AND THE METHOD OF USING THE SAME
MULTI-TOUCH PANEL
INPUT APPARATUS AND METHOD FOR DETECTING THE CONTACT POSITION OF INPUT APPARATUS
PORTABLE TERMINAL REFLECTING USER'S ENVIRONMENT AND METHOD FOR OPERATING THE SAME
REMOTE CONTROL DEVICE AND REMOTE CONTROL METHOD USING THE SAME
METHODS AND APPARATUS FOR PAGING RECEPTION IN MULTIMODE WIRELESS NETWORKS
INFUSION UNIT FOR DRINKS WITH WASHING SYSTEM
AN ENERGY TRANSMITTING SHEET PROFILE FOR INVISIBLE INCORPORATION INTO A BUILDING CLIMATE SHIELD, AND A METHOD AND SHEET PROFILE FOR SUCH INCORPORATION
FEMALE ASSEMBLY CAPABLE OF ADJUSTING A TILT ANGLE OF A LAMP AND A LAMP ASSEMBLY USING THE SAME
METHOD AND SYSTEM FOR AUTOMATICALLY IDENTIFYING RELATED CONTENT TO AN ELECTRONIC TEXT
HEARING INSTRUMENT FOR ROUND OR OVAL WINDOW STIMULATION
CONTROLLED DOSE FLUID DISPENSER
USE OF FIBER OPTICS TO MONITOR CEMENT QUALITY
APPARATUS FOR CONTROLLING BATTERY POWER IN ACCORDANCE WITH A WORK MODE IN A HYBRID INDUSTRIAL VEHICLE
LOCAL PURGING SYSTEM
