发明名称 POSITIVE PHOTORESIST COMPOSITION
摘要 PURPOSE: Provided is a positive photoresist composition which can reduce the excess usage of expensive dissolution inhibitor, and has excellent resolution and high degree of photosensitivity. CONSTITUTION: The positive photoresist composition comprising an alkali-soluble phenol novolac resin, a photoactive compound(PAC) which is a dissolution inhibitor based on O-naphthaquinone diazide sulfonic ester, a solvent, a dye, and an additive, is characterized by further comprising p-t-butylphenol novolac resin having a repeating unit of formula 1 and a number average molecular weight of 1,000-3,000, as a dissolution inhibiting aid.
申请公布号 KR20030042264(A) 申请公布日期 2003.05.28
申请号 KR20010072978 申请日期 2001.11.22
申请人 HANSOL PAPER CO., LTD. 发明人 KIM, SEONG HO;PARK, JONG JIN
分类号 G03F7/039 主分类号 G03F7/039
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