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发明名称
SEMICONDUCTOR WAFER CONTAINER CLEANING APPARATUS
摘要
申请公布号
EP1313573(A2)
申请公布日期
2003.05.28
申请号
EP20010984548
申请日期
2001.06.20
申请人
SEMITOOL, INC.
发明人
BEXTEN, DANIEL, P.;NORBY, JERRY, R.;BRYER, JAMES
分类号
H01L21/304;B08B3/02;B08B3/12;B08B9/08;B08B9/32;H01L21/00;(IPC1-7):B08B3/02;B08B5/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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