An alignment wafer for a semiconductor processing tool has a disk having a radius of a standard semiconductor wafer. The disk is formed of a flexible, substantially non-deformable material. A concentric transparent disk is inside of the disk.
申请公布号
US6568098(B1)
申请公布日期
2003.05.27
申请号
US20010035495
申请日期
2001.12.28
申请人
MICROTOOL, INC.
发明人
BECKHART GORDON HAGGOTT;CONARRO PATRICK ROONEY;FARIVAR-SADRI KAMRAN MICHAEL
