| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust gas recycling and circulating apparatus in which the exhaust gas is highly treated by a simple and low cost system. SOLUTION: The exhaust gas 21 flows into a waste gas regeneration apparatus 3 through a liquid chemical mist removing and recovering apparatus constituted of a liquid chemical mist removing apparatus main filter. Cleaned air is obtained in the waste gas regeneration apparatus 3 by passing the waste gas through the liquid chemical recovering apparatus 4 constituted of three units of the main filter 12, a filling type cooler 13, and a post filter 18, passing through a wet type gas removing apparatus 5 using a hydrophilic porous body 19 as a filler, and after that, passing through a high treatment apparatus 6 constituted of a heating coil 7, a dry type gas removing apparatus 8, and a HEPA filter 9. The cleaned air is supplied to a clean room. |
