STRUCTURE FOR ATTACHING PELLICLE TO PHOTO-MASK

摘要

PURPOSE: A structure for attaching a pellicle to a photo-mask is provided to be capable of preventing the deformation phenomenon from being generated between the pellicle and the photo-mask due to an adhesive. CONSTITUTION: A protruding part(1a) is formed at the predetermined peripheral portion of a pellicle frame(1) as one piece for loading a photo-mask(5). At this time, the pellicle frame is pressed toward the photo-mask direction by using an 'L' shaped sub-part(8) connected with the protruding part. The contact state between the pellicle frame and the photo-mask, is stably conserved without the shape deformation generated between the pellicle frame and the photo-mask by indirectly connecting the pellicle frame with the photo-mask using the sub-part and an adhesive.