SINGLE/MULTI CANTILEVER PROBE FOR ATOMIC FORCE MICROSCOPY AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A single/multi cantilever probe and a method for manufacturing the same are provided to store and read an electric charge with high-speed, high-precision and high resolution by integrating MOSFET channels with a front end of a cantilever arm. CONSTITUTION: A cantilever probe includes a p-type single crystal silicon-on-insulator substrate having a single crystal bulk type first silicon layer(1). A first insulation layer and a second silicon layer are sequentially deposited on the single crystal bulk type first silicon layer(1). A second insulation layer is formed on the p-type single crystal silicon-on-insulator substrate. At least one source electrode pad(17a) and at least one drain electrode pad(17b) are formed on the second insulation layer. At least one cantilever arm(7) extends in a rod shape from the second silicon layer. First and second connecting wires(17c,17d), which are connected to the source electrode pad(17a) and the drain electrode pad(17b), are formed at both sides of the cantilever arm(7). At least one FET channel(11) is provided.