发明名称 Method for reducing capacitive coupling between conductive lines
摘要 An embodiment of the present invention discloses a memory device having an array with digit lines arranged in complementary pairs, the array comprising; a substantially planar layer having trenches therein; a first level of digit lines residing at least partially in the trenches; a second level of digit lines residing on the surface of the layer, the second level extending in generally parallel relation to the digit lines in the first level. The first level of digit lines are in alternating positions with the second level of digit lines and the alternating positions comprise a repeating pattern of a first complementary pair of digit lines at the first level adjacent a second complementary pair of digit lines at the second level.
申请公布号 US6570258(B2) 申请公布日期 2003.05.27
申请号 US20010884630 申请日期 2001.06.18
申请人 MICRON TECHNOLOGY, INC. 发明人 MA KIN F.;STUBBS ERIC T.
分类号 H01L21/768;(IPC1-7):H01L29/40;H01L23/48;H01L27/108 主分类号 H01L21/768
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