发明名称 MOSFET with a buried gate
摘要 An insulation is formed on a substrate of a material having a first conductivity type. A gate material is formed on the insulation. A portion of the gate material is removed thereby creating forming mesa type gate structures from remaining positions of the gate material. The mesas are then insulated. A channel forming layer, of a material having a second conductivity type, is formed between the produced mesas. Finally, a source of a material having the first conductivity type is formed on the channel forming layer.
申请公布号 US6570218(B1) 申请公布日期 2003.05.27
申请号 US20000593447 申请日期 2000.06.19
申请人 INTERNATIONAL RECTIFIER CORPORATION 发明人 BOL IGOR
分类号 H01L21/28;H01L21/336;H01L29/51;H01L29/78;(IPC1-7):H01L29/76;H01L29/94 主分类号 H01L21/28
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