DISCHARGE ELECTRODE AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a discharge electrode, together with its manufacturing method, capable of providing a stable laser output while extending the life of an electrode before replacement by suppressing degradation of the electrode. SOLUTION: A film 5 is formed at discharge parts 2a and 3a of main discharge electrodes 2 and 3. In order to prevent the discharge parts 2a and 3a from being eroded by a halogen gas, the film 5 comprises a halogen-resistant substance which is hard to react with the halogen gas contained in laser gas. Furthermore, in order to prevent the discharge parts 2a and 3a from being deformed under the impact or heat of main discharge, the film 5 comprises a substance which is harder than the metal of main discharge electrodes 2 and 3 or that whose melting point is higher than that of the metal of the main discharge electrodes 2 and 3.