COOLING DEVICE FOR LASER OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To assure safety and reliability of cooling device body for a laser oscillator, and to protect the laser medium of the laser oscillator. SOLUTION: A control part 16 which controls refrigeration cycle and cooling cycle comprises a calculation device 17 which at least controls a compressor 3 and a heater 14, and an instantaneous blackout detecting circuit 26 which is electrically connected to the calculation device 17 and detects instantaneous blackout due to abrupt drop of a power source voltage. If the instantaneous blackout detecting circuit 26 detects an instantaneous blackout equal to or longer than the semi-cycle of power source frequency during operation of the compressor, a temperature control for a laser oscillator 12 using refrigeration cycle and cooling cycle is interrupted.