发明名称 DIE BONDER
摘要 PROBLEM TO BE SOLVED: To provide a die bonder which prevents alignment errors when picking up a chip, and which is inexpensive and superior in maintenance properties. SOLUTION: The die bonder is provided with a wafer mount table 10 and a wafer ring 30 rotatably holding a diced wafer 20 on the wafer mount table 10. An alignment mark 40 for alignment wafer 20 is given to the wafer mount table 10.
申请公布号 JP2003151999(A) 申请公布日期 2003.05.23
申请号 JP20010345498 申请日期 2001.11.12
申请人 NIKON CORP 发明人 OKOCHI NAOKI;SHIKODA TADASHI
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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