LITHOGRAPHIC APPARATUS, METHOD OF MANUFACTURING DEVICE, AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus of pre-aligning a polygonal substrate more accurately and rapidly than the conventional method by using a lithographic projection apparatus to feed a substrate to a substrate table with prescribed positioning accuracy, which never presses a substrate and therefore has no danger of breaking the edge. SOLUTION: The lithographic projection apparatus receives a substrate W by a supporter 1 of a pre-aligner once, and then rotates the substrate W about the axis of rotation RA to measure each point on the edge of the substrate by means of an edge sensor ES, and then estimates each side and each angle at each intersection between each two sides of the substrate W to determine the position of the substrate W on the pre-aligner. The substrate W is transferred to a substrate table WT using the positional data. Consequently, a substrate of any polygonal shape including a square can be disposed on the substrate table rapidly and accurately.