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发明名称
PROCEDIMENTO PER LA DEFINIZIONE DI APERTURE DI DIMENSIONI SUB-LITOGRAFICHE IN SUBSTRATI DI SILICIO
摘要
申请公布号
ITMI20031045(D0)
申请公布日期
2003.05.23
申请号
IT2003MI01045
申请日期
2003.05.23
申请人
STMICROELECTRONICS S.R.L.
发明人
DAMASCENI MARCO
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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