发明名称 TRANSISTOR OF SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A transistor of a semiconductor device and a manufacturing method thereof are provided to be capable of improving the refresh operating characteristic of a DRAM device and preventing the generation of coupling noise due to shielding effect by using a sub-electrode. CONSTITUTION: A gate electrode(44) connected with the first voltage power supply(500), is electrically isolated from a semiconductor substrate(41) by using a gate oxide layer(43). A source(47s) is formed at one side of the gate electrode(44) in the semiconductor substrate(41). A drain(47d) is formed at the other side of the gate electrode(44). A sub-electrode(400) connected with the second voltage power supply(600), is formed at both sides of the gate electrode(44), wherein the sub-electrode(400) is electrically isolated from the gate electrode(44), the source and drain(47s,47d) by using an oxide layer(46). A constant voltage is conserved between the gate electrode(44) and a bit line by using the sub-electrode(400), thereby preventing the generation of coupling noise.
申请公布号 KR20030040919(A) 申请公布日期 2003.05.23
申请号 KR20010071584 申请日期 2001.11.17
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SEO, JAE BEOM
分类号 H01L21/28;G11C11/406;H01L21/336;H01L21/768;H01L21/8242;H01L27/108;H01L29/417;H01L29/49;H01L29/78 主分类号 H01L21/28
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