TRANSPORTATION APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR TRANSPORTATION

摘要

PROBLEM TO BE SOLVED: To provide a transportation apparatus capable of transporting wafers accurately, and also to provide a semiconductor manufacturing equipment and a method for transportation using the same. SOLUTION: A wafer 10 held by an arm 3 is imaged three-dimensionally by means of a plurality of CCD cameras 7. Based on the image data of the imaged wafer 10, the position and the inclination of the wafer 10 on the arm 3 are analyzed. Based on the analysis, the arm 3 is extended or contracted and rotated to transport the wafer 10.