| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film-forming apparatus which can transfer a thin film formed on a sheet film to a substrate as the film having smooth surface and uniform thickness by smoothly moving a first plate to a second plate, and then surely calibrating relative inclination of both plates. SOLUTION: An inclination calibrating mechanism 8 is provided with first and second support members 82, 84. This first support member 82 is coupled with the first plate 4 via the first axial member 81, extending in a first direction X and freely rotatably supports the first plate 4 about a first turning axis AX1. Moreover, the second support member 84 is coupled with the first support member 82 via the second axial member 83 extending in a second direction Y and supports turnably the first support member 82 about the second turning axis AX2. Therefore, the first plate 4 is tiltable with respect to the moving direction Z by the axial rotation around the two turning axes AX1, AX2.
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