发明名称 WAVELENGTH DETECTOR AND FLUORINE MOLECULE LASER DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To detect accurate wavelength using the absorption part of a reference light, in a wavelength detector which uses the emission line of bromine close to the wavelength of F2 laser as a reference light. SOLUTION: The wavelength detector combines the light from a reference light source 10 with the light from a light source to be detected for spectroscopy with a spectrograph 20, and then the spectrum is detected with a spectrum sensor 26. A bromine discharge lamp which accompanies self-absorption is used as the reference light source 10, and the self-absorption line is employed as a reference wavelength.
申请公布号 JP2003152247(A) 申请公布日期 2003.05.23
申请号 JP20010348246 申请日期 2001.11.14
申请人 GIGAPHOTON INC;USHIO INC 发明人 NAKAIKE TAKANORI;WAKABAYASHI OSAMU;YOSHIOKA MASAKI
分类号 G01J9/00;G03F7/20;H01L21/027;H01S3/00;H01S3/137;(IPC1-7):H01S3/00 主分类号 G01J9/00
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