发明名称 CAPACITOR OF SEMICONDUCTOR ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a capacitor of a semiconductor element in which a leakage current and dielectric loss are reduced, and its manufacturing method. SOLUTION: The capacitor contains a first electrode 27 formed on a substrate, ferroelectric substance 29 which is formed on the electrode 27 and contains bismuth, a second electrode 31 formed on the ferroelectric substance containing bismuth, and amorphous bismuth oxide films 28, 30 which are interposed at least in one portion between the first electrode and the ferroelectric substance containing bismuth or between the ferroelectric substance containing bismuth and the second electrode.
申请公布号 JP2003152167(A) 申请公布日期 2003.05.23
申请号 JP20020235743 申请日期 2002.08.13
申请人 HYNIX SEMICONDUCTOR INC 发明人 LEE SEOK-WON
分类号 H01L27/105;H01L21/02;H01L21/8246;(IPC1-7):H01L27/105 主分类号 H01L27/105
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