SPREADER CONNECTING INJECTOR

摘要

PURPOSE: A spreader connecting an injector is provided to optimize a process performed within a chamber by controlling the curvature and the number of injection holes on a curved face of the spreader. CONSTITUTION: One end portion(155a) of a spreader(155) is coupled with or decouple form an end portion(150a) of an injector(150). The other end portion(155b) of the spreader is covered with a curved face(155c). The other end portion has a larger diameter than the diameter of the former end portion in the gas injector. The curved face is projected to a wafer. A plurality of injection holes(155d) are formed on the curved face. The spreader is formed with a predetermined material such as ceramic in order to minimize the influence due to the reaction pressure and the temperature of the inside of a chamber.