摘要 |
PROBLEM TO BE SOLVED: To prolong the service life of a vibration wave motor by reducing wear in the frictional engagement faces thereof for stabilizing the drive capability thereof. SOLUTION: The vibration wave motor 10 comprises an elastic body 12 and a movable body 13, which conducts relative motion to the elastic body 12. One of the frictional engagement faces of the moving body 13 with the elastic body 12 is made of a hard alumite film (porous oxide film layer) 17, which is an unsealed oxide film having microscopic holes which are to be closed by sealing. The other friction engagement face is made of a metallic material, whose Vickers hardness is set to be not more than 450. |