发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND INFRARED DETECTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To prevent deterioration due to difference of thermal expansion coefficient which is caused by heat cycle, and improve cooling efficiency, regarding a method for manufacturing a semiconductor device, a semiconductor device and an infrared detecting device. SOLUTION: In first semiconductor base substance 1, an Hg1-y Cdy Te (0<y<1) layer 3 for element formation is formed on a Cd1-x Znx Te (0<=x<0.05) substrate 2. A hybrid semiconductor device is formed by making the first semiconductor base substance 1 face second semiconductor base substance 4 and combining them by using combining electrodes 5. At least a part of the base substance 2 is eliminated from a rear side of the base substance 2 by using selective etching solution.
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申请公布号 |
JP2003152171(A) |
申请公布日期 |
2003.05.23 |
申请号 |
JP20010344264 |
申请日期 |
2001.11.09 |
申请人 |
FUJITSU LTD |
发明人 |
ARINAGA KENJI;SUDO HAJIME |
分类号 |
H01L27/146;H01L21/306;H01L21/308;H01L25/16;H01L27/14;H01L31/10;(IPC1-7):H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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