EXPOSURE METHOD AND PROJECTION ALIGNER

摘要

PROBLEM TO BE SOLVED: To provide an exposure method and apparatus which can increase light efficiency. SOLUTION: A light ray having a uniform light flux distribution is generated and then refracted into a plurality of dispersion light beams. The plurality of light beams are refracted into a plurality of collimated beams, and then exposed onto an target object. Thus, since a difference in a light flux between the initially generated ray and the beams for exposure of the target object is minimized, light efficiency can be increased.