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发明名称
DEVICE FOR TREATING A DISC-SHAPED OBJECT
摘要
申请公布号
SG96222(A1)
申请公布日期
2003.05.23
申请号
SG20010002972
申请日期
2001.05.17
申请人
SEZ AG
发明人
JOHANNES LINDNER
分类号
H01L21/306;H01L21/00;H01L21/304;H01L21/687;(IPC1-7):H01L21/302;H01L21/68
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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