| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck wherein a dielectric layer which is excellent in anticorrosion to plasma of corrosive gas and whose suction property is improved by adding conductive component is presupposed, and irregularity and temperature change of volume resistivity of the layer are small, so that irregularity of suction property is small and usable temperature range is wide. SOLUTION: This electrostatic chuck 1 is provided with an electrode 3 and the dielectric layer 2 which is arranged on the electrode 3 and sucks a member 10 to be sucked by applying a voltage to the electrode 3. The dielectric layer 2 is composed of a composite ceramic. In the composite ceramic, at a ratio to the whole, silicon carbide of 0.5-45 mass % and at least one kind out of titanium nitride, titanium carbide and tungsten carbide of 0.1-10 mass % by the total amount are added to aluminum nitride, volume resistivity at a working temperature is 10<8> -10<13>Ω.cm, and thermal conductivity is at least 30 W/m.K.</p> |
