摘要 |
PROBLEM TO BE SOLVED: To provide a time of flight mass spectrometer capable of providing a stable mass spectrum without providing a constant temperature bath of high performance. SOLUTION: A flight tube 30 is held by a holding member 31 made of a low thermal conductivity material in a vacuum chamber 20, and an ion accelerator 22 and an ion detector 23 (in case of a reciprocating type, reflectron 24 also) are fixed on this flight tube 30. Consequently, the flight tube 30 is thermally insulated from the vacuum chamber 20 by the holding member 31 and vacuum, and temperature fluctuation range can be restrained small. Moreover, at the time of starting this device vacuum drawing in the vacuum chamber 20 is carried out after raising temperature at first. |