| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment method that is effectively used in a projection aligner having a space optical modulator. SOLUTION: An exposure pattern is formed by a space optical modulator comprising a plurality of mirrors that can independently control the inclination of a reflecting surface. The exposure pattern is projected and exposed to an object for forming an irregular pattern in the object, and further other exposure patterns are projected and exposed to the object. At this time, light is projected to the irregular pattern of the object via a space optical modulator, and the alignment of the object is performed based on the detection result of the light image of the irregular pattern. |
